Cov synthesis Nitride thawj zaug hauv xyoo 1857 los ntawm Henri Edoub Saint {}} claik wensille thiab Friedrich Wöirler. Nyob rau hauv lawv synthesis, crucible uas muaj silicon tau muab tso rau hauv ib tug crucible uas muaj carbon thiab rhuab kom txo cov pa roj oxygen. Lawv tau tshaj tawm cov khoom lag luam lawv hu ua silicon nitride, tab sis tsis muaj peev xwm txiav txim siab nws cov tshuaj muaj kuab lom.
Xyoo 1879, Paul Schukasdger npaj cov khoom los ntawm cua sov silicon tov nrog cov ntaub qhwv ntsej muag, ua kom muaj qhov sib xyaw ua ke nrog cov khoom sib xyaw nrog cov sib xyaw nrog cov lej SI3N4. Xyoo 1910, Ludwig Weiss thiab Theodor Enginehardt npaj SI3N4 los ntawm cua sov Theem Silicon hauv cov ntshiab nitrogen. Xyoo 1925, sittederich thiab sitter synthesized silicon nitride los ntawm cua sov silicpher thiab carbon nyob rau hauv ib qho chaw nitrogen siv cov pa thermal.