Txoj kev cai ntawm silicon nitride tau tshaj tawm nyob rau xyoo 1857 los ntawm Henri Edualoard Saint-Clair deville thiab Friedrich Wöirler. Hauv lawv cov synthesis, ib tug crucible nrog silicon tau muab tso rau hauv ib tug crucible puv nrog carbon thiab rhuab kom txo cov pa oxygen. Lawv tau tshaj tawm cov khoom uas lawv hu ua silicon nitride, tab sis tsis muaj peev xwm txiav txim nws cov tshuaj muaj pes tsawg leeg tshuaj.
Xyoo 1879, Paul schütenberger tau txais cov khoom lag luam los ntawm cov khoom cua sov sib xyaw nrog cov ntaub nyias nyias uas tuaj yeem siv cov av nplaum uas tuaj yeem siv ua ke nrog SI3N4. Xyoo 1910, Ludwig Weiss thiab Theodor Engelhardt tsim si3n4 los ntawm cua sov theem cua silical silicon hauv ntshiab nitrogen. Xyoo 1925, friedrich thiab sittig synthesized silicon nitride los ntawm cua sov silickas thiab carbon nyob rau hauv lub nitrogen}} degree siv cov pa thermal txo cov pa roj carbon.